Extreme Ultraviolet Scatterometry for Characterizing Nanometer Scale Features in a Damascene Sample

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2024
Authors: Klein, C.,

Jenkins, N.,

Shao, Y.,

Li, Y.,

Park, S.,

Kim, W.,

Kapteyn, H.,

Murnane, M.
Journal: Frontiers in Optics + Laser Science 2024 (FiO, LS)
Volume: FTu1B.2
Pages: FTu1B.2
Publication Date: 2024-09
Publisher: Optica Publishing Group
URL: http://dx.doi.org/10.1364/FIO.2024.FTu1B.2
DOI: 10.1364/fio.2024.ftu1b.2

STROBE Publications