Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging

Refereed Designation:Refereed
Publication Type
Journal Article
Publication Year
2023
Authors
Esashi, Yuka,
Jenkins, Nicholas W.,
Shao, Yunzhe,
Shaw, Justin M.,
Park, Seungbeom,
Murnane, Margaret M.,
Kapteyn, Henry C.,
Tanksalvala, Michael
Journal
Review of Scientific Instruments
Volume
97
Pages
123705
Publication Date
2023-12-1
Publisher
AIP Publishing
URL
http://dx.doi.org/10.1063/5.0175860
DOI
10.1063/5.0175860

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