STROBE-contributed + Non-Refereed

1

Adaptive design of EUV scatterometry through efficient Bayesian inference

Y. Shao, N. W. Jenkins, C. Klein, M. M. Murnane, H. C. Kapteyn, Metrology, Inspection, and Process Control XL, 13981, 220, (2026).

10.1117/12.3100655

2

Information-optimal phase mask design for lensless imaging

L. A. Kabuli, E. Markley, L. Waller, Computational Optical Imaging and Artificial Intelligence in Biomedical Sciences III, 13865, 22, (2026).

10.1117/12.3077933

3

Direct Observation of Nanoscale Polarization Switching in HZO Ferroelectrics Using STEM-EBIC

P. Venkatesan, Y. Chen, T. P. O’Neill, H. Chan, H. Jayasankar, P. Ravikumar, Z. Wang, S. S. Fields, M. K. Lenox, W. A. Hubbard, A. Padovani, L. Larcher, G. Thareja, S. Yu, J. F. Ihlefeld, W. Kim, D. Ha, B. C. Regan, A. Khan, 2025 IEEE International Electron Devices Meeting (IEDM), 1-4, (2025).

10.1109/iedm50572.2025.11353770

4

Spectral DefocusCam: Super-Resolved Hyperspectral Imaging Through Defocus

C. Foley, E. Markley, K. Yanny, L. Waller, K. Monakhova, 2025 IEEE International Conference on Computational Photography (ICCP), 1-12, (2025).

10.1109/iccp64821.2025.11143845

5

Multi-element tomography: leveraging absorption and phase contrast in soft x-ray ptychography

J. Plumb, A. Ditter, D. Kim, K. Lee, Y. Yu, D. Shapiro, X-Ray Nanoimaging: Instruments and Methods VII, 13622, 4, (2025).

10.1117/12.3063920

6

An Exponential Convolutional Neural Network for Rapid Detection of Bacteria from Raman Spectra on Edge Devices

K. Liu, W. Wait, Y. Li, 2025 IEEE 68th International Midwest Symposium on Circuits and Systems (MWSCAS), 351-355, (2025).

10.1109/mwscas53549.2025.11244463

7

The Effect of Electrode Structure on Ferroelectric Domains in Hf0.5Zr0.5O2

T. O'Neill, Y. Chen, H. Chan, M. Lenox, W. Hubbard, J. Ihlefeld, B. Regan, Microscopy & Microanalysis, 31, ozaf048.567, (2025).

10.1093/mam/ozaf048.567

8

A Gaussian Parameterization for Direct Atomic Structure Identification in Electron Tomography

N. M. Singh, T. Chien, A. C. McCray, C. Ophus, L. Waller, 2025 IEEE International Conference on Computational Photography (ICCP), 1-10, (2025).

10.1109/iccp64821.2025.11143828

9

Event2Audio: Event-Based Optical Vibration Sensing

M. Cai, D. Galor, A. Kohli, J. L. Yates, L. Waller, 2025 IEEE International Conference on Computational Photography (ICCP), 1-12, (2025).

10.1109/iccp64821.2025.11143833

10

Chemical Shifts Observed Using Energy Dispersive Spectroscopy

M. Mecklenburg, R. Jin, Y. Heffes, B. Zutter, T. O’Neill, J. Lodico, B. Regan, Y. Chen, Microscopy and Microanalysis, 31, ozaf048.825, (2025).

10.1093/mam/ozaf048.825

11

Crystal Nucleation and Growth in High-Entropy Alloys Revealed by Atomic Electron Tomography

J. Miao, Y. Yuan, S. Moniri, Y. Yang, J. Zhou, A. Yuan, D. Kim, Y. Yang, C. Li, W. Chen, P. Ercius, Microscopy and Microanalysis, 31, ozaf048.792, (2025).

10.1093/mam/ozaf048.792

12

Annealing Optimization for HZO Thin Films with In-Situ STEM EBIC Characterization

Y. Chen, H. Chan, T. O’Neill, M. Lenox, W. Hubbard, J. Ihlefeld, B. Regan, Microscopy and Microanalysis, 31, ozaf048.574, (2025).

10.1093/mam/ozaf048.574

13

Optimized EUV Scatterometry Measurements with Tunable High Harmonic Generation and the Fisher Information Matrix

C. Klein, N. W. Jenkins, Y. Shao, Y. Li, S. Park, W. Kim, H. C. Kapteyn, M. M. Murnane, Metrology, Inspection, and Process Control XXXIX, 1342607, 5, (2025).

10.1117/12.3051113

14

Lab-based multi-wavelength EUV diffractometry for critical dimensions

B. M. Barnes, A. Chew, N. W. Jenkins, Y. Shao, M. Y. Sohn, R. ph Kline, D. F. Sunday, P. P. Balakrishnan, T. A. Germer, S. Grantham, C. Klein, S. L. Moffitt, E. L. Shirley, H. C. Kapteyn, M. M. Murnane, Metrology, Inspection, and Process Control XXXIX, 134261V, 63, (2025).

10.1117/12.3050342

15

Enhanced EUV mask imaging using Fourier ptychographic microscopy

C. Gu, A. Islegen-Wojdyla, M. P. Benk, K. A. Goldberg, L. Waller, Optical and EUV Nanolithography XXXVIII, 13424, 40, (2025).

10.1117/12.3051223

16

Nonlinear up-conversion of spatiotemporal vortices into the EUV via high harmonic generation

R. Martín-Hernández, G. Gui, L. Plaja, H. C. Kapteyn, M. M. Murnane, M. A. Porras, C. Liao, C. Hernández García, Complex Light and Optical Forces XIX, 13393, 20, (2025).

10.1117/12.3045574

17

Random speckle patterns with azimuthal propagation order

R. Piestun, P. Rodriguez, Optica Open, (2025).

10.1364/opticaopen.30968266

18

Exploring Structural Anisotropy in Amorphous Tb-Co via Changes in Medium-Range Ordering

E. Kennedy, E. Hollingworth, A. Ceballos, D. O’Mahoney, C. Ophus, F. Hellman, M. Scott, Microscopy and Microanalysis, 31, ozae113, (2024).

10.1093/mam/ozae113

19

Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanoscale Metrology

Y. Shao, N. W. Jenkins, C. Klein, Y. Li, Y. Esashi, M. Tanksalvala, M. M. Murnane, H. C. Kapteyn, Frontiers in Optics + Laser Science 2024 (FiO, LS), FTu1B.3, FTu1B.3, (2024).

10.1364/fio.2024.ftu1b.3

20

Extreme Ultraviolet Scatterometry for Characterizing Nanometer Scale Features in a Damascene Sample

C. C. Klein, N. N. Jenkins, Y. Y. Shao, Y. Y. Li, S. S. Park, W. W. Kim, H. H. Kapteyn, M. M. Murnane, Frontiers in Optics + Laser Science 2024 (FiO, LS), FTu1B.2, FTu1B.2, (2024).

10.1364/fio.2024.ftu1b.2

21

Mapping Moiré Potentials with STEM EBIC Imaging

T. O’Neill, E. Elias, Y. Chen, H. Chan, Q. Shi, B. Regan, Microscopy and Microanalysis, 30, ozae044.774, (2024).

10.1093/mam/ozae044.774

22

Detecting Chemical Shifts with Energy Dispersive Spectroscopy

Y. Chen, R. Jin, Y. Heffes, B. Zutter, T. O’Neill, J. Lodico, B. Regan, M. Mecklenburg, Microscopy and Microanalysis, 30, ozae044.143, (2024).

10.1093/mam/ozae044.143

23

Nano-PUND and STEM EBIC Imaging for Ferroelectric Polarization Mapping

H. Chan, Y. Chen, T. O’Neill, S. Fields, M. Lenox, J. Ihlefeld, W. Hubbard, B. Regan, Microscopy and Microanalysis, 30, ozae044.074, (2024).

10.1093/mam/ozae044.074

24

MicroED-Informed 4D-STEM of MOFs for Carbon Capture

S. Karstens, M. Dods, A. Saha, K. Bustillo, P. Ercius, J. Long, A. Minor, Microscopy and Microanalysis, 30, ozae044.922, (2024).

10.1093/mam/ozae044.922

25

Atomic Electron Tomography of Thin Films

A. Bhalla-Levine, K. Park, J. Park, P. Ercius, J. Miao, Microscopy and Microanalysis, 30, ozae044.888, (2024).

10.1093/mam/ozae044.888

26

Understanding Ferroelectric Polarization in Hafnium Zirconium Oxide

B. Regan, Y. Chen, T. O’Neill, S. Fields, M. Lenox, J. Ihlefeld, W. Hubbard, H. Chan, Microscopy and Microanalysis, 30, ozae044.679, (2024).

10.1093/mam/ozae044.679

27

Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanostructure Metrology

Y. Shao, N. W. Jenkins, C. Klein, Y. Li, Y. Esashi, M. M. Murnane, H. C. Kapteyn, M. Tanksalvala, 2024 IEEE Conference on Computational Imaging Using Synthetic Apertures (CISA), 1-5, (2024).

10.1109/cisa60639.2024.10576406

28

EUV scatterometry: low-dose characterization of polymer-based metamaterials

N. W. Jenkins, Y. Esashi, Y. Shao, M. Tanksalvala, H. C. Kapteyn, M. M. Murnane, M. Atkinson, Metrology, Inspection, and Process Control XXXVIII, 12955, 37, (2024).

10.1117/12.3009911

29

Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy

S. Ribet, S. Zeltmann, K. Bustillo, R. Dhall, P. Denes, A. Minor, R. dos Reis, V. Dravid, C. Ophus, Microscopy and Microanalysis, 29, 1950-1960, (2023).

10.1093/micmic/ozad111

30

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using extreme ultraviolet, coherent diffractive imaging reflectometry

M. Tanksalvala, Y. Esashi, C. L. Porter, N. W. Jenkins, B. Wang, Z. Zhang, G. P. Miley, N. Horiguchi, S. Yazdi, C. Liao, M. Gerrity, H. C. Kapteyn, M. M. Murnane, Frontiers in Optics + Laser Science 2023 (FiO, LS), LM1F.4, (2023).

10.1364/ls.2023.lm1f.4

31

Soft x-ray vector ptycho-tomography: a new quantitative vector nanoimaging method for spin textures in 3D

C. Liao, A. Rana, E. Iacocca, J. Zou, M. Pham, X. Lu, E. Cating Subramanian, Y. Lo, S. Ryan, C. Bevis, R. Karl, A. Glaid, J. Rable, P. Mahale, J. Hirst, T. Ostler, W. Liu, C. O’Leary, Y. Yu, K. Bustillo, H. Ohldag, D. Shapiro, S. Yazdi, T. Mallouk, S. J. Osher, H. Kapteyn, V. Crespi, J. V. Badding, Y. Tserkovnyak, M. M. Murnane, J. Miao, Spintronics XVI, 12656, 13, (2023).

10.1117/12.2679845

32

Beyond MicroED: Ab Initio Structure Elucidation using 4D-STEM

A. Saha, A. Pattison, M. Mecklenburg, A. Brewster, P. Ercius, J. Rodriguez, Microscopy and Microanalysis, 29, 309-310, (2023).

10.1093/micmic/ozad067.143

33

Disentangling Tilt and Polarization Measurements in 4D-STEM Measurements of a Multilayer by Inversion of a Stacked Bloch Wave Model

S. Zeltmann, S. Hsu, H. Brown, S. Susarla, A. Minor, C. Ophus, Microscopy and Microanalysis, 29, 256-257, (2023).

10.1093/micmic/ozad067.115

34

Phase Diversity in Ptychographic Reconstructions with a Programmable Phase Plate

S. Ribet, S. Zeltmann, G. Varnavides, R. dos Reis, V. Dravid, C. Ophus, Microscopy and Microanalysis, 29, 296-297, (2023).

10.1093/micmic/ozad067.137

35

Spectrum Imaging of a Lithium Ion Battery Anode Using Thin Fluid Cells

M. Mecklenburg, J. Lodico, H. Chan, Y. Chen, X. Ling, B. Regan, Microscopy and Microanalysis, 29, 672-673, (2023).

10.1093/micmic/ozad067.331

36

Observation of Simultaneous Successive Twinning Using Atomic Electron Tomography

P. Pelz, C. Groschner, A. Bruefach, C. Ophus, M. Scott, Microscopy and Microanalysis, 29, 707-708, (2023).

10.1093/micmic/ozad067.348

37

Mapping Conductivity in the TEM with SEEBIC

W. Hubbard, H. Chan, B. Regan, Microscopy and Microanalysis, 29, 1851-1852, (2023).

10.1093/micmic/ozad067.956

38

Emission-Based Temperature Mapping with STEM EBIC

W. Hubbard, M. Mecklenburg, H. Chan, B. Regan, Microscopy and Microanalysis, 29, 1608-1609, (2023).

10.1093/micmic/ozad067.825

39

Elucidating the Role of Cr Migration in Ni-Cr Exposed to Molten FLiNaK via STEM-Based Methods

S. Mills, R. Hayes, N. Bieberdorf, S. Zeltmann, A. Kennedy, R. Scarlat, M. Asta, A. Minor, Microscopy and Microanalysis, 29, 1505-1506, (2023).

10.1093/micmic/ozad067.774

40

Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks

B. Wang, N. Brooks, M. Tanksalvala, Y. Esashi, N. Jenkins, P. Johnsen, I. Binnie, G. Gui, Y. Shao, M. Murnane, H. Kapteyn, Photomask Technology 2022, 12293, 122930D, (2022).

10.1117/12.2641726

41

High-Resolution Conductivity Mapping with STEM EBIC

W. Hubbard, H. Chan, B. C. Regan, International Symposium for Testing and Failure Analysis, istfa2022p0251, 251-253, (2022).

10.31399/asm.cp.istfa2022p0251

42

Chemical Shift Detection with Energy Dispersive Spectroscopy (EDS)

R. Jin, B. Zutter, B. C. Regan, M. Mecklenburg, Microscopy and Microanalysis, 27, 2068-2069, (2021).

10.1017/s1431927621007480

43

A Multislice Approach to Quantify Laser-Induced Lattice Temperature from Ultrafast Electron Diffraction Measurements of Single-Crystal Films

D. Durham, K. Siddiqui, C. Ophus, A. Minor, D. Filippetto, Microscopy and Microanalysis, 28, 888-890, (2022).

10.1017/s1431927622003920

44

Separation of EBIC Modes with Two-Channel STEM EBIC

W. A. Hubbard, H. Chan, M. Mecklenburg, B. C. Regan, Microscopy and Microanalysis, 28, 2508-2509, (2022).

10.1017/s143192762200959x

45

Determining the Polarization Fraction of Thin Film Ferroelectric HZO with STEM EBIC

H. Chan, S. S. Fields, T. O'Neill, Y. Chen, W. A. Hubbard, J. F. Ihlefeld, B. C. Regan, Microscopy and Microanalysis, 28, 2270-2271, (2022).

10.1017/s1431927622008728

46

In Situ Transmission Kikuchi Diffraction Observation of Thin-Film GST Crystal Phase and Grain Evolution

Y. Chen, H. Chan, B. C. Regan, M. Mecklenburg, Microscopy and Microanalysis, 28, 2314-2315, (2022).

10.1017/s1431927622008893

47

Detecting Temperature-Induced Strain Changes using In Situ Transmission Kikuchi Diffraction

Y. Chen, J. J. Lodico, X. Ling, B. C. Regan, M. Mecklenburg, Microscopy and Microanalysis, 28, 576-577, (2022).

10.1017/s1431927622002884

48

Commissioning of an X-Band Cavity for Longitudinal Phase Space Linearization at UCLA PEGASUS Laboratory

P. Denham, P. Musumeci, A. Ody, Proceedings of the 13th International Particle Accelerator Conference, Thailand, (2022).

10.18429/JACOW-IPAC2022-THPOST040

49

Direct observation of topological magnetic monopoles using soft x-ray vector ptychography at 10 nm resolution

C. Liao, A. Rana, E. Iacocca, J. Zou, M. Pham, X. Lu, E. Subramanian, Y. Lo, S. A. Ryan, C. S. Bevis, R. M. Karl, A. J. Glaid, J. Rable, P. Mahale, J. Hirst, T. Ostler, W. Liu, C. M. O'Leary, Y. Yu, K. Bustillo, H. Ohldag, D. A. Shapiro, S. Yazdi, T. E. Mallouk, S. J. Osher, H. C. Kapteyn, V. H. Crespi, J. V. Badding, Y. Tserkovnyak, J. Miao, M. M. Murnane, Optica High-brightness Sources and Light-driven Interactions Congress 2022, JTh6A.3, (2022).

10.1364/euvxray.2022.jth6a.3

50

Automated Crystal Orientation Mapping in py4DSTEM using Sparse Correlation Matching

C. Ophus, S. E. Zeltmann, A. Bruefach, A. Rakowski, B. H. Savitzky, A. M. Minor, M. C. Scott, Microscopy and Microanalysis, 1-14, (2022).

10.1017/s1431927622000101

Publications

STROBE-contributed + Non-Refereed Publications

2026