Annealing Optimization for HZO Thin Films with In-Situ STEM EBIC Characterization

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2025
Authors: Chen, Yueyun,

Chan, Ho Leung,

O’Neill, Tristan P,

Lenox, Megan K,

Hubbard, William A,

Ihlefeld, Jon F,

Regan, B C
Journal: Microscopy and Microanalysis
Volume: 31
Pages: ozaf048.574
Publication Date: 2025-7
Publisher: Oxford University Press (OUP)
URL: http://dx.doi.org/10.1093/mam/ozaf048.574
DOI: 10.1093/mam/ozaf048.574

STROBE Publications