Optimized EUV Scatterometry Measurements with Tunable High Harmonic Generation and the Fisher Information Matrix

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Journal Article
Publication Year
2025
Authors
Klein, Clay,
Jenkins, Nicholas W.,
Shao, Yunzhe,
Li, Yunhao,
Park, Seungbeom,
Kim, Wookrae,
Kapteyn, Henry C.,
Murnane, Margaret M.
Journal
Metrology, Inspection, and Process Control XXXIX
Volume
1342607
Pages
5
Publication Date
2025-4-24
Publisher
SPIE
URL
http://dx.doi.org/10.1117/12.3051113
DOI
10.1117/12.3051113

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