A new metrology technique for defect inspection via coherent Fourier scatterometry using orbital angular momentum beamsRefereed Designation:Non-refereed/STROBE-contributed Publication Type Journal Article Publication Year 2021 Authors Wang, Bin, Tanksalvala, Michael, Zhang, Zhe, Esashi, Yuka, Jenkins, Nicholas, Murnane, Margaret, Kapteyn, Henry, Liao, Chen-Ting Journal Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV Publication Date 2021-02-22 Publisher SPIE URL http://dx.doi.org/10.1117/12.2584728 DOI 10.1117/12.2584728 PDF of Paper Previous Next