A new metrology technique for defect inspection via coherent Fourier scatterometry using orbital angular momentum beams

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Journal Article
Publication Year
2021
Authors
Wang, Bin,
Tanksalvala, Michael,
Zhang, Zhe,
Esashi, Yuka,
Jenkins, Nicholas,
Murnane, Margaret,
Kapteyn, Henry,
Liao, Chen-Ting
Journal
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
Publication Date
2021-02-22
Publisher
SPIE
URL
http://dx.doi.org/10.1117/12.2584728
DOI
10.1117/12.2584728

PDF of Paper