Adaptive design of EUV scatterometry through efficient Bayesian inference

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2026
Authors: Shao, Yunzhe,

Jenkins, Nicholas W.,

Klein, Clay,

Murnane, Margaret M.,

Kapteyn, Henry C.
Journal: Metrology, Inspection, and Process Control XL
Volume: 13981
Pages: 220
Publication Date: 2026-4-8
Publisher: SPIE
URL: http://dx.doi.org/10.1117/12.3100655
DOI: 10.1117/12.3100655

STROBE Publications