Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light
Refereed Designation:Non-refereed/STROBE-contributed
- Publication Type
- Conference Paper
- Publication Year
- 2019
- Authors
-
Tanksalvala, Michael,
Porter, Christina L.,
Esashi, Yuka,
Miley, Galen P.,
Horiguchi, Naoto,
Karl, Robert M.,
Johnsen, Peter,
Bevis, Charles S.,
Jenkins, Nicholas W.,
Wang, Bin,
Zhang, Xiaoshi,
Cousin, Seth L.,
Adams, Daniel E.,
Gerrity, Michael,
Kapteyn, Henry C.,
