STROBE Publications

Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Conference Paper
Publication Year
2019
Authors
Tanksalvala, Michael,
Porter, Christina L.,
Esashi, Yuka,
Miley, Galen P.,
Horiguchi, Naoto,
Karl, Robert M.,
Johnsen, Peter,
Bevis, Charles S.,
Jenkins, Nicholas W.,
Wang, Bin,
Zhang, Xiaoshi,
Cousin, Seth L.,
Adams, Daniel E.,
Gerrity, Michael,
Kapteyn, Henry C.,
Murnane, Margaret M.
Conference Name
Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)
Conference Location
Munich, Germany
Publication Date
2019-06-24
Publisher
Optical Society of America
URL
http://dx.doi.org/10.1364/COSI.2019.CW3A.6
DOI
10.1364/cosi.2019.cw3a.6