STROBE Publications

Extreme ultraviolet microscope characterization using photomask surface roughness

Refereed Designation:Refereed
Publication Type
Journal Article
Publication Year
2020
Authors
Gunjala, Gautam,
Wojdyla, Antoine,
Sherwin, Stuart,
Shanker, Aamod,
Benk, Markus P.,
Goldberg, Kenneth A.,
Naulleau, Patrick P.,
Waller, Laura
Journal
Scientific Reports
Short Title
Sci Rep
Volume
10
Pages
11673
Publication Date
2020-7-15
Publisher
Springer Science and Business Media LLC
URL
http://dx.doi.org/10.1038/s41598-020-68588-w
DOI
10.1038/s41598-020-68588-w

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