Extreme ultraviolet microscope characterization using photomask surface roughnessRefereed Designation:Refereed Publication Type Journal Article Publication Year 2020 Authors Gunjala, Gautam, Wojdyla, Antoine, Sherwin, Stuart, Shanker, Aamod, Benk, Markus P., Goldberg, Kenneth A., Naulleau, Patrick P., Waller, Laura Journal Scientific Reports Short Title Sci Rep Volume 10 Pages 11673 Publication Date 2020-7-15 Publisher Springer Science and Business Media LLC URL http://dx.doi.org/10.1038/s41598-020-68588-w DOI 10.1038/s41598-020-68588-w PDF of Paper Previous Next
