STROBE Publications

Full characterization of ultrathin 5-nm low- k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties

Refereed Designation:Refereed
Publication Type
Journal Article
Publication Year
2020
Authors
Frazer, Travis D.,
Knobloch, Joshua L.,
Hernández-Charpak, Jorge N.,
Hoogeboom-Pot, Kathleen M.,
Nardi, Damiano,
Yazdi, Sadegh,
Chao, Weilun,
Anderson, Erik H.,
Tripp, Marie K.,
King, Sean W.,
Kapteyn, Henry C.,
Murnane, Margaret M.,
Abad, Begoña
Journal
Physical Review Materials
Short Title
Phys. Rev. Materials
Volume
4
Pages
073603
Publication Date
2020-7-13
Publisher
American Physical Society (APS)
URL
http://dx.doi.org/10.1103/PhysRevMaterials.4.073603
DOI
10.1103/physrevmaterials.4.073603

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