Full characterization of ultrathin 5-nm low- k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties

Refereed

Publication Type: Journal Article
Publication Year: 2020
Authors: Frazer, Travis D.,

Knobloch, Joshua L.,

Hernández-Charpak, Jorge N.,

Hoogeboom-Pot, Kathleen M.,

Nardi, Damiano,

Yazdi, Sadegh,

Chao, Weilun,

Anderson, Erik H.,

Tripp, Marie K.,

King, Sean W.,

Kapteyn, Henry C.,

Murnane, Margaret M.,

Abad, Begoña
Journal: Physical Review Materials
Short Title: Phys. Rev. Materials
Volume: 4
Pages: 073603
Publication Date: 2020-7-13
Publisher: American Physical Society (APS)
URL: http://dx.doi.org/10.1103/PhysRevMaterials.4.073603
DOI: 10.1103/physrevmaterials.4.073603

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