Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanostructure Metrology

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Conference Proceedings
Publication Year
2024
Authors
Shao, Yunzhe,
Jenkins, Nicholas W.,
Klein, Clay,
Li, Yunhao,
Esashi, Yuka,
Murnane, Margaret M.,
Kapteyn, Henry C.,
Tanksalvala, Michael
Conference Name
2024 IEEE Conference on Computational Imaging Using Synthetic Apertures (CISA)
Conference Location
Boulder, CO
Publication Date
2024-5-20
Publisher
IEEE
URL
http://dx.doi.org/10.1109/CISA60639.2024.10576406
DOI
10.1109/cisa60639.2024.10576406

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