Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanostructure MetrologyRefereed Designation:Non-refereed/STROBE-contributed Publication Type Conference Proceedings Publication Year 2024 Authors Shao, Yunzhe, Jenkins, Nicholas W., Klein, Clay, Li, Yunhao, Esashi, Yuka, Murnane, Margaret M., Kapteyn, Henry C., Tanksalvala, Michael Conference Name 2024 IEEE Conference on Computational Imaging Using Synthetic Apertures (CISA) Conference Location Boulder, CO Publication Date 2024-5-20 Publisher IEEE URL http://dx.doi.org/10.1109/CISA60639.2024.10576406 DOI 10.1109/cisa60639.2024.10576406 PDF of Paper Previous Next