Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

Refereed

Publication Type: Journal Article
Publication Year: 2021
Authors: Tanksalvala, Michael,

Porter, Christina L.,

Esashi, Yuka,

Wang, Bin,

Jenkins, Nicholas W.,

Zhang, Zhe,

Miley, Galen P.,

Knobloch, Joshua L.,

McBennett, Brendan,

Horiguchi, Naoto,

Yazdi, Sadegh,

Zhou, Jihan,

Jacobs, Matthew N.,

Bevis, Charles S.,

Karl, Robert M.,

Johnsen, Peter,

Ren, David,

Waller, Laura,

Adams, Daniel E.,

Cousin, Seth L.,

Liao, Chen-Ting,

Miao, Jianwei,

Gerrity, Michael,

Kapteyn, Henry C.,

Murnane, Margaret M.
Journal: Science Advances
Short Title: Sci. Adv.
Volume: 7
Issue: 5
Pages: eabd9667
Publication Date: 2021-01-27
Publisher: American Association for the Advancement of Science (AAAS)
URL: http://dx.doi.org/10.1126/sciadv.abd9667
DOI: 10.1126/sciadv.abd9667

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