STROBE Publications

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

Refereed Designation:Refereed
Publication Type
Journal Article
Publication Year
2021
Authors
Tanksalvala, Michael,
Porter, Christina L.,
Esashi, Yuka,
Wang, Bin,
Jenkins, Nicholas W.,
Zhang, Zhe,
Miley, Galen P.,
Knobloch, Joshua L.,
McBennett, Brendan,
Horiguchi, Naoto,
Yazdi, Sadegh,
Zhou, Jihan,
Jacobs, Matthew N.,
Bevis, Charles S.,
Karl, Robert M.,
Johnsen, Peter,
Ren, David,
Waller, Laura,
Adams, Daniel E.,
Cousin, Seth L.,
Liao, Chen-Ting,
Miao, Jianwei,
Gerrity, Michael,
Kapteyn, Henry C.,
Murnane, Margaret M.
Journal
Science Advances
Short Title
Sci. Adv.
Volume
7
Issue
5
Pages
eabd9667
Publication Date
2021-01-27
Publisher
American Association for the Advancement of Science (AAAS)
URL
http://dx.doi.org/10.1126/sciadv.abd9667
DOI
10.1126/sciadv.abd9667

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