STROBE Publications

Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Journal Article
Publication Year
2019
Authors
Esashi, Yuka,
Porter, Christina L.,
Tanksalvala, Michael,
Miley, Galen P.,
Horiguchi, Naoto,
Knobloch, Joshua L.,
Zhou, Jihan,
Karl, Robert M.,
Johnsen, Peter,
Bevis, Charles S.,
Wang, Bin,
Cousin, Seth L.,
Gerrity, Michael,
Kapteyn, Henry C.,
Murnane, Margaret M.
Journal
Microscopy and Microanalysis
Short Title
Microsc Microanal
Volume
25
Issue
S2
Pages
116-117
Publication Date
2019-08-05
Publisher
Cambridge University Press (CUP)
ISSN
1431-9276
URL
http://dx.doi.org/10.1017/S1431927619001314
DOI
10.1017/s1431927619001314

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