Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source
Refereed Designation:Non-refereed/STROBE-contributed
- Publication Type
- Journal Article
- Publication Year
- 2019
- Authors
-
Esashi, Yuka,
Porter, Christina L.,
Tanksalvala, Michael,
Miley, Galen P.,
Horiguchi, Naoto,
Knobloch, Joshua L.,
Zhou, Jihan,
Karl, Robert M.,
Johnsen, Peter,
Bevis, Charles S.,
Wang, Bin,
Cousin, Seth L.,
Gerrity, Michael,
Kapteyn, Henry C.,
