Ptychographic Complex Imaging Reflectometry for Spatially-Resolved Dopant Profiling Using a Tabletop EUV Source

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2019
Authors: Esashi, Yuka,

Porter, Christina L.,

Tanksalvala, Michael,

Miley, Galen P.,

Horiguchi, Naoto,

Knobloch, Joshua L.,

Zhou, Jihan,

Karl, Robert M.,

Johnsen, Peter,

Bevis, Charles S.,

Wang, Bin,

Cousin, Seth L.,

Gerrity, Michael,

Kapteyn, Henry C.,

Murnane, Margaret M.
Journal: Microscopy and Microanalysis
Short Title: Microsc Microanal
Volume: 25
Issue: S2
Pages: 116-117
Publication Date: 2019-08-05
Publisher: Cambridge University Press (CUP)
ISSN: 1431-9276
URL: http://dx.doi.org/10.1017/S1431927619001314
DOI: 10.1017/s1431927619001314

STROBE Publications