Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2022
Authors: Wang, Bin,

Brooks, Nathan,

Tanksalvala, Michael,

Esashi, Yuka,

Jenkins, Nicolas,

Johnsen, Peter,

Binnie, Iona,

Gui, Guan,

Shao, Yunzhe,

Murnane, Margaret,

Kapteyn, Henry
Journal: Photomask Technology 2022
Volume: 12293
Pages: 122930D
Publication Date: 2022-12-1
Publisher: SPIE
URL: http://dx.doi.org/10.1117/12.2641726
DOI: 10.1117/12.2641726

STROBE Publications