Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography

Refereed Designation:Refereed
Publication Type
Journal Article
Publication Year
2022
Authors
Knobloch, Joshua L.,
McBennett, Brendan,
Bevis, Charles S.,
Yazdi, Sadegh,
Frazer, Travis D.,
Adak, Amitava,
Nelson, Emma E.,
Hernández-Charpak, Jorge N.,
Cheng, Hiu Y.,
Grede, Alex J.,
Mahale, Pratibha,
Nova, Nabila Nabi,
Giebink, Noel C.,
Mallouk, Thomas E.,
Badding, John V.,
Kapteyn, Henry C.,
Abad, Begoña,
Murnane, Margaret M.
Journal
ACS Applied Materials & Interfaces
Short Title
ACS Appl. Mater. Interfaces
Volume
14
Issue
36
Pages
41316-41327
Publication Date
2022-9-2
Publisher
American Chemical Society (ACS)
URL
http://dx.doi.org/10.1021/acsami.2c09360
DOI
10.1021/acsami.2c09360

PDF of Paper