Total Electron Yield Mapping of Electronic Device Features via Measurement of X-Ray Beam-Induced Currents

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2019
Authors: Hubbard, William A.,

Lodico, Jared J.,

Zutter, Brian,

Shapiro, David,

Lo, Yuan Hung,

Rana, Arjun,

Morrill, Drew,

Gentry, Christian,

Chan, Ho Leung,

Regan, B. C.
Journal: Microscopy and Microanalysis
Short Title: Microsc Microanal
Volume: 25
Issue: S2
Pages: 256-257
Publication Date: 2019-08-05
Publisher: Cambridge University Press (CUP)
ISSN: 1431-9276
URL: http://dx.doi.org/10.1017/S1431927619002010
DOI: 10.1017/s1431927619002010

STROBE Publications