STROBE Publications

Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Conference Paper
Publication Year
2018
Authors
Karl, Robert,
Mancini, Giulia F.,
Knobloch, Joshua,
Frazer, Travis,
Hernandez-Charpak, Jorge N.,
Abad Mayor, Begoña,
Tanksalvala, Michael,
Porter, Christina L.,
Bevis, Charles S.,
Chao, Weilun,
Adams, Daniel E.,
Kapteyn, Henry C.,
Murnane, Margaret
Conference Name
Metrology, Inspection, and Process Control for Microlithography XXXII
Conference Location
San Jose, California
Publication Date
2018-03-13
Publisher
SPIE
URL
http://dx.doi.org/10.1117/12.2297223
DOI
10.1117/12.2297223

PDF of Paper