Coherent Fourier scatterometry using orbital angular momentum beams for defect detectionRefereed Designation:Refereed Publication Type Journal Article Publication Year 2021 Authors Wang, Bin, Tanksalvala, Michael, Zhang, Zhe, Esashi, Yuka, Jenkins, Nicholas W., Murnane, Margaret M., Kapteyn, Henry C., Liao, Chen-Ting Journal Optics Express Short Title Opt. Express Volume 29 Issue 3 Pages 3342-3358 Publication Date 2021-02-01 Publisher The Optical Society URL http://dx.doi.org/10.1364/OE.414584 DOI 10.1364/oe.414584 PDF of Paper Previous Next
