Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV LightRefereed Designation:Non-refereed/STROBE-contributed Publication Type Journal Article Publication Year 2020 Authors Jenkins, Nicholas W., Tanksalvala, Michael, Esashi, Yuka, Porter, Christina L., Wang, Bin, Horiguchi, Naoto, Jacobs, Matthew N., Gerrity, Michael, Kapteyn, Henry C., Murnane, Margaret M. Journal OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS) Publication Date 2020-11-16 Publisher OSA URL http://dx.doi.org/10.1364/EUVXRAY.2020.EW3A.4 DOI 10.1364/euvxray.2020.ew3a.4 PDF of Paper Previous Next