Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV Light

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2020
Authors: Jenkins, Nicholas W.,

Tanksalvala, Michael,

Esashi, Yuka,

Porter, Christina L.,

Wang, Bin,

Horiguchi, Naoto,

Jacobs, Matthew N.,

Gerrity, Michael,

Kapteyn, Henry C.,

Murnane, Margaret M.
Journal: OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS)
Publication Date: 2020-11-16
Publisher: OSA
URL: http://dx.doi.org/10.1364/EUVXRAY.2020.EW3A.4
DOI: 10.1364/euvxray.2020.ew3a.4

STROBE Publications