Determining the Polarization Fraction of Thin Film Ferroelectric HZO with STEM EBIC

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2022
Authors: Chan, Ho Leung,

Fields, Shelby S.,

O'Neill, Tristan,

Chen, Yueyun,

Hubbard, William A.,

Ihlefeld, Jon F.,

Regan, B. C.
Journal: Microscopy and Microanalysis
Short Title: Microsc Microanal
Volume: 28
Issue: S1
Pages: 2270-2271
Publication Date: 2022-7-22
Publisher: Cambridge University Press (CUP)
URL: http://dx.doi.org/10.1017/S1431927622008728
DOI: 10.1017/s1431927622008728

STROBE Publications