Direct Observation of Nanoscale Polarization Switching in HZO Ferroelectrics Using STEM-EBIC

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Journal Article
Publication Year
2025
Authors
Venkatesan, Prasanna,
Chen, Yueyun,
O’Neill, Tristan P.,
Chan, Ho Leung,
Jayasankar, Hari,
Ravikumar, Priyankka,
Wang, Zekai,
Fields, Shelby S.,
Lenox, Megan K.,
Hubbard, William A.,
Padovani, Andrea,
Larcher, Luca,
Thareja, Gaurav,
Yu, Shimeng,
Ihlefeld, Jon F.,
Kim, Wanki,
Ha, Daewon,
Regan, Brian C.,
Khan, Asif
Journal
2025 IEEE International Electron Devices Meeting (IEDM)
Pages
1-4
Publication Date
2025-12-6
Publisher
IEEE
URL
http://dx.doi.org/10.1109/IEDM50572.2025.11353770
DOI
10.1109/iedm50572.2025.11353770