Lab-based multi-wavelength EUV diffractometry for critical dimensions

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Journal Article
Publication Year
2025
Authors
Barnes, Bryan M.,
Chew, Aaron,
Jenkins, Nicholas W.,
Shao, Yunzhe,
Sohn, Martin Y.,
Kline, R. Joseph,
Sunday, Daniel F.,
Balakrishnan, Purnima P.,
Germer, Thomas A.,
Grantham, Steven,
Klein, Clay,
Moffitt, Stephanie L.,
Shirley, Eric L.,
Kapteyn, Henry C.,
Murnane, Margaret M.
Journal
Metrology, Inspection, and Process Control XXXIX
Volume
134261V
Pages
63
Publication Date
2025-4-24
Publisher
SPIE
URL
http://dx.doi.org/10.1117/12.3050342
DOI
10.1117/12.3050342

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