Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanoscale Metrology

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2024
Authors: Shao, Yunzhe,

Jenkins, Nicholas W.,

Klein, Clay,

Li, Yunhao,

Esashi, Yuka,

Tanksalvala, Michael,

Murnane, Margaret M.,

Kapteyn, Henry C.
Journal: Frontiers in Optics + Laser Science 2024 (FiO, LS)
Volume: FTu1B.3
Pages: FTu1B.3
Publication Date: 2024-09
Publisher: Optica Publishing Group
URL: http://dx.doi.org/10.1364/FIO.2024.FTu1B.3
DOI: 10.1364/fio.2024.ftu1b.3

STROBE Publications