Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using extreme ultraviolet, coherent diffractive imaging reflectometry

Refereed Designation:Non-refereed/STROBE-contributed
Publication Type
Conference Proceedings
Publication Year
2023
Authors
Tanksalvala, Michael,
Esashi, Yuka,
Porter, Christina L.,
Jenkins, Nicholas W.,
Wang, Bin,
Zhang, Zhe,
Miley, Galen P.,
Horiguchi, Naoto,
Yazdi, Sadegh,
Liao, Chen-Ting,
Gerrity, Michael,
Kapteyn, Henry C.,
Murnane, Margaret M.
Conference Name
Frontiers in Optics + Laser Science 2023 (FiO, LS)
Conference Location
Tacoma, Washington
Publication Date
2023-10
Publisher
Optica Publishing Group
URL
http://dx.doi.org/10.1364/LS.2023.LM1F.4
DOI
10.1364/ls.2023.lm1f.4

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