Real-time optical thickness determination for producing ultra-thin silicon membranes using anisotropic potassium hydroxide etchingRefereed Designation:Refereed Publication Type Journal Article Publication Year 2024 Authors Gislason, Leif, Genc, Sahra, Thompson, Sally, Crawford, Jerry, Jessing, Jeff Journal MRS Advances Short Title MRS Advances Publication Date 2024-10-18 Publisher Springer Science and Business Media LLC URL http://dx.doi.org/10.1557/s43580-024-00945-7 DOI 10.1557/s43580-024-00945-7 PDF of Paper Previous Next
