Electrical Isolation Preserved by Plasma Focused Ion Beam TEM Sample Preparation and Verified with STEM SEEBIC Imaging

Non-refereed/STROBE-contributed

Publication Type: Journal Article
Publication Year: 2020
Authors: Mecklenburg, Matthew,

Shaapur, Fred,

Hubbard, William,

Zutter, Brian,

Regan, B. C.
Journal: Microscopy and Microanalysis
Short Title: Microsc Microanal
Issue: 26
Pages: 194-195
Publication Date: 2020-07-30
Publisher: Cambridge University Press (CUP)
URL: http://dx.doi.org/10.1017/S1431927620013756
DOI: 10.1017/s1431927620013756

STROBE Publications